Engineering Materials
Semiconductor-On-Insulator Materials for Nanoelectronics Applications
Alexei Nazarov | J.-P. Colinge | Francis Balestra | Jean-Pierre Raskin | Francisco Gamiz | V.S. Lysenko
Technology & Engineering / Nanotechnology & MEMS
"Semiconductor-On-Insulator Materials for NanoElectronics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
| Publication Date: |
14 October 2014 |
| Publisher: |
Springer Berlin Heidelberg |
| Imprint: |
Springer |
| ISBN-13: |
9783642267086 |
| Format: |
Paperback softback |
| Page Count: |
447 |