Radio Frequency Sputtering: Thin-Film Deposition and Device Applications

Sharma, Aditya; Lim, Weon Cheol; Sharma, Poorva; Singh, Jitendra Pal

Details

Published by: Wiley-VCH

Publication Date: 2026-11-24

Format: Hardcover

ISBN-13: 9783527356225

DOI:

Dimensions: 244.00cm x170.00cm

Pages: 432