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MEMS Reliability

MEMS Reliability

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MEMS Reference Shelf

MEMS Reliability

Allyson L. Hartzell | Mark G. da Silva | Herbert R. Shea

Technology & Engineering / Electronics / General

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.

MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.


Publication Date: 27 December 2012
Publisher: Springer US
Imprint: Springer
ISBN-13: 9781461427360
Format: Paperback softback
Page Count: 291

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