{"product_id":"9789401078214","title":"Photovoltaic Power Generation: Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987","description":"\u003ch1\u003ePhotovoltaic Power Generation: Proceedings of the Second Contractors’ Meeting held in Hamburg, 16–18 September 1987\u003c\/h1\u003e \u003ch2\u003eVan Overstraeten, R.; Caratti, G.\u003c\/h2\u003e \u003cp\u003eAmorphous silicon PV panel mass production will require to mas­ ter plasma chemical deposition in terms of large sizes, cost, maintenance and all other problems related to industrialization. Since plasma deposition is a novel technique, the development of all this production related know how involves a considerable technical research effort. The major problems related to the design of a production deposi­ tion machine are the following - deposition should be uniform on very large area substrate (typical dimension 1 meter) ; - the deposited amorphous silicon should have good electronic properties (density of state of the order or less than 16 3 10 cm \/eV) and very low impurities concentrations (for exam­ ple oxygen atomic concentration should idealy be less than 0. 01 %) ; - the film stress should be limited, the density of ponctual defects (particulates) should remain reasonable (less than 2 per 100 cm ) ; - dopant level control should be stable and efficient ; - silane consumption should remain reasonably efficient - financial cost being important the machine productivity should be high hence deposition rate optimized ; - downtime due to maintenance should be reduced to a minimum. We present here some results on the R\u0026amp;D effort addressed to the above mentioned problems. An original single chamber was designed. This machine will be made available on the market for R\u0026amp;D purposes by a process machine company. Finally the maintenance problem is considered. Plasma cleaning based on a fluorine containing etchant gases is studied and evaluated. 2.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2012-04-02\u003c\/p\u003e \u003cp\u003eFormat: Paperback\u003c\/p\u003e \u003cp\u003eISBN-13: 9789401078214\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-94-009-2933-3\u003c\/p\u003e \u003cp\u003eDimensions: 235.0cm x155.0cm\u003c\/p\u003e \u003cp\u003ePages: 320.0\u003c\/p\u003e ","brand":"Springer Netherlands","offers":[{"title":"Default Title","offer_id":44422487670924,"sku":"9789401078214","price":98.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9789401078214.jpg?v=1756267216","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9789401078214","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}