{"product_id":"9789401073691","title":"Plasma-Surface Interactions and Processing of Materials","description":"\u003ch1\u003ePlasma-Surface Interactions and Processing of Materials\u003c\/h1\u003e \u003ch2\u003eAuciello, O.; Gras-Martí, Alberto; Valles-Abarca, Jose Antonio; Flamm, Daniel L.\u003c\/h2\u003e \u003cp\u003eAn understanding of the processes involved in the basic and  applied physics and chemistry of the interaction of plasmas with  materials is vital to the evolution of technologies such as those  relevant to microelectronics, fusion and space. \u003cbr\u003e  The subjects dealt with in the book include: the physics and chemistry  of plasmas, plasma diagnostics, physical sputtering and chemical  etching, plasma assisted deposition of thin films, ion and electron  bombardment, and plasma processing of inorganic and polymeric  materials. \u003cbr\u003e  The book represents a concentration of a substantial amount of  knowledge acquired in this area - knowledge which was hitherto  widely scattered throughout the literature - and thus  establishes a baseline reference work for both established and tyro  research workers.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2011-10-01\u003c\/p\u003e \u003cp\u003eFormat: Paperback\u003c\/p\u003e \u003cp\u003eISBN-13: 9789401073691\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-94-009-1946-4\u003c\/p\u003e \u003cp\u003eDimensions: 235.0cm x155.0cm\u003c\/p\u003e \u003cp\u003ePages: 558.0\u003c\/p\u003e ","brand":"Springer Netherlands","offers":[{"title":"Default Title","offer_id":44408003199116,"sku":"9789401073691","price":296.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9789401073691.jpg?v=1767706019","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9789401073691","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}