{"product_id":"9789401052030","title":"NATO Science Series E:","description":"\u003ch1\u003eNATO Science Series E:\u003c\/h1\u003e \u003ch2\u003eCoffa, S.; Priolo, F.; Rimini, Emanuele; Poate, J.M.\u003c\/h2\u003e \u003cp\u003eSemiconductors lie at the heart of some of the most important  industries and technologies of the twentieth century. The complexity  of silicon integrated circuits is increasing considerably because of  the continuous dimensional shrinkage to improve efficiency and  functionality. This evolution in design rules poses real challenges  for the materials scientists and processing engineers. Materials,  defects and processing now have to be understood in their totality.  World experts discuss, in this volume, the crucial issues facing  lithography, ion implication and plasma processing, metallization and  insulating layer quality, and crystal growth. Particular emphasis is  placed upon silicon, but compound semiconductors and photonic  materials are also highlighted. The fundamental concepts of phase  stability, interfaces and defects play a key role in understanding  these crucial issues. These concepts are reviewed in a crucial  fashion. \u003cbr\u003e\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2012-10-13\u003c\/p\u003e \u003cp\u003eFormat: Paperback\u003c\/p\u003e \u003cp\u003eISBN-13: 9789401052030\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-94-011-2714-1\u003c\/p\u003e \u003cp\u003eDimensions: 240cm x160cm\u003c\/p\u003e \u003cp\u003ePages: 538\u003c\/p\u003e ","brand":"Springer Netherlands","offers":[{"title":"Default Title","offer_id":44398552318092,"sku":"9789401052030","price":197.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9789401052030.jpg?v=1771511919","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9789401052030","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}