Micro and Nano Fabrication: Tools and Processes

Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Details

Published by: Springer

Publication Date: 2015-01-20

Format: Hardcover

ISBN-13: 9783662443941

DOI: 10.1007/978-3-662-44395-8

Dimensions: 235cm x155cm

Pages: 519