Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments

Ivanov, Alexey

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Details

Published by: Springer Vieweg

Publication Date: 2017-09-22

Format: Paperback

ISBN-13: 9783658192372

DOI: 10.1007/978-3-658-19238-9

Dimensions: 210cm x148cm

Pages: 316