Microtechnology and MEMS: Efficient Dynamic Compact Models

Bechtold, Tamara; Rudnyi, Evgenii B.; Korvink, Jan G.

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

Details

Published by: Springer

Publication Date: 2010-11-25

Format: Paperback

ISBN-13: 9783642070976

DOI: 10.1007/978-3-540-34613-5

Dimensions: 235cm x155cm

Pages: 180