Springer Series in Materials Science: Physical Principles and Technical Implementation

Herman, Marian A.; Richter, W.; Sitter, Helmut

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy’s coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.

Details

Published by: Springer

Publication Date: 2004-01-22

Format: Hardcover

ISBN-13: 9783540678212

DOI: 10.1007/978-3-662-07064-2

Dimensions: 235cm x155cm

Pages: 525