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Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.
Published by: Springer
Publication Date: 2006-10-30
Format: Hardcover
ISBN-13: 9783540357964
DOI: 10.1007/b137342
Dimensions: 235cm x155cm
Pages: 427