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Shape and Functional Elements of the Bulk Silicon Microtechnique
  • Shape and Functional Elements of the Bulk Silicon Microtechnique
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures

Frühauf, Joachim

Details

Published by: Springer

Publication Date: 2004-10-12

Format: Hardcover

ISBN-13: 9783540221098

DOI: 10.1007/b138230

Dimensions: 235cm x155cm

Pages: 222

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