{"product_id":"9783527346684","title":"Atomic Layer Processing Semiconductor Dry Etching Technology","description":"\u003ch1\u003eAtomic Layer Processing\u003c\/h1\u003e\u003ch2\u003eSemiconductor Dry Etching Technology\u003c\/h2\u003e\u003ch3\u003eThorsten Lill\u003c\/h3\u003e\u003cdiv\u003e\u003cb\u003eTechnology \u0026amp; Engineering \/ Materials Science \/ Thin Films, Surfaces \u0026amp; Interfaces\u003c\/b\u003e\u003c\/div\u003e\u003cbr\u003e\u003cdiv\u003e\n\u003cp\u003e\u003cb\u003eLearn about fundamental and advanced topics in etching with this practical guide\u003c\/b\u003e\u003c\/p\u003e \u003cp\u003e\u003ci\u003eAtomic Layer Processing: Semiconductor Dry Etching Technology\u003c\/i\u003e delivers a hands-on, one-stop resource for understanding etching technologies and their applications. The distinguished scientist, executive, and author offers readers in-depth information on the various etching technologies used in the semiconductor industry, including thermal, isotropic atomic layer, radical, ion-assisted, and reactive ion etching.\u003c\/p\u003e \u003cp\u003eThe book begins with a brief history of etching technology and the role it has played in the information technology revolution, along with a collection of commonly used terminology in the industry. It then moves on to discuss a variety of different etching techniques, before concluding with discussions of the fundamentals of etching reactor design and newly emerging topics in the field such as the role played by artificial intelligence in the technology.\u003c\/p\u003e \u003cp\u003e\u003ci\u003eAtomic Layer Processing\u003c\/i\u003e includes a wide variety of other topics as well, all of which contribute to the author's goal of providing the reader with an atomic-level understanding of dry etching technology sufficient to develop specific solutions for existing and emerging semiconductor technologies. Readers will benefit from:\u003c\/p\u003e \u003cul\u003e \u003cli\u003eA complete discussion of the fundamentals of how to remove atoms from various surfaces\u003c\/li\u003e \u003cli\u003eAn examination of emerging etching technologies, including laser and electron beam assisted etching\u003c\/li\u003e \u003cli\u003eA treatment of process control in etching technology and the role played by artificial intelligence\u003c\/li\u003e \u003cli\u003eAnalyses of a wide variety of etching methods, including thermal or vapor etching, isotropic atomic layer etching, radical etching, directional atomic layer etching, and more\u003c\/li\u003e \u003c\/ul\u003e \u003cp\u003ePerfect for materials scientists, semiconductor physicists, and surface chemists, \u003ci\u003eAtomic Layer Processing\u003c\/i\u003e will also earn a place in the libraries of engineering scientists in industry and academia, as well as anyone involved with the manufacture of semiconductor technology. The author's close involvement with corporate research \u0026amp; development and academic research allows the book to offer a uniquely multifaceted approach to the subject.\u003c\/p\u003e\n\u003c\/div\u003e\u003cdiv\u003e \u003cp\u003e\u003cb\u003e\u003ci\u003eThorsten Lill, PhD,\u003c\/i\u003e\u003c\/b\u003e is Vice President of Emerging Etch Technologies and Systems at Lam Research. He received his doctorate in Physics from the Albert Ludwigs University in Freiburg, Germany and researched as a post doc at the Argonne National Laboratory. He has published 88 articles in the field and holds 89 patents.\u003c\/p\u003e \u003c\/div\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003ePublication Date: \u003c\/td\u003e\n\u003ctd\u003e06 July 2021\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePublisher: \u003c\/td\u003e\n\u003ctd\u003eWiley\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eImprint: \u003c\/td\u003e\n\u003ctd\u003eWiley-VCH\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eISBN-13: \u003c\/td\u003e\n\u003ctd\u003e9783527346684\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFormat: \u003c\/td\u003e\n\u003ctd\u003ePaperback \/ softback\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePage Count: \u003c\/td\u003e\n\u003ctd\u003e304\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight (oz): \u003c\/td\u003e\n\u003ctd\u003e20.0\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":44384643219596,"sku":"9783527346684","price":153.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9783527346684_c164bbed-06df-4e1e-b21f-4002ecb529b4.jpg?v=1780616934","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9783527346684","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}