{"product_id":"9783319762937","title":"NanoScience and Technology","description":"\u003ch1\u003eNanoScience and Technology\u003c\/h1\u003e \u003ch2\u003eShim, Seongbo; Shin, Youngsoo\u003c\/h2\u003e \u003cp\u003e\u003c\/p\u003e\u003cp\u003eThis book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2018-04-03\u003c\/p\u003e \u003cp\u003eFormat: Hardcover\u003c\/p\u003e \u003cp\u003eISBN-13: 9783319762937\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-3-319-76294-4\u003c\/p\u003e \u003cp\u003eDimensions: 235cm x155cm\u003c\/p\u003e \u003cp\u003ePages: 138\u003c\/p\u003e ","brand":"Springer International Publishing","offers":[{"title":"Default Title","offer_id":47662057521292,"sku":"9783319762937","price":98.99,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9783319762937.jpg?v=1776436342","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9783319762937","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}