Simulation of Semiconductor Processes and Devices 1998: SISPAD 98

Meyer, Kristin De; Biesemans, Serge

This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)

Details

Published by: Springer

Publication Date: 1998-08-17

Format: Hardcover

ISBN-13: 9783211832080

DOI: 10.1007/978-3-7091-6827-1

Dimensions: 244cm x170cm

Pages: 410