{"product_id":"9781489918062","title":"Rapid Thermal Processing of Semiconductors","description":"\u003ch1\u003eRapid Thermal Processing of Semiconductors\u003c\/h1\u003e \u003ch2\u003eBorisenko, Victor E.; Hesketh, Peter J.\u003c\/h2\u003e \u003cp\u003eRapid thermal processing has contributed to the development of  single wafer cluster processing tools and other innovations in  integrated circuit manufacturing environments. Borisenko and Hesketh  review theoretical and experimental progress in the field, discussing  a wide range of materials, processes, and conditions. They thoroughly  cover the work of international investigators in the field.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 2013-06-20\u003c\/p\u003e \u003cp\u003eFormat: Paperback\u003c\/p\u003e \u003cp\u003e ISBN-10: 9781489918062\u003c\/p\u003e \u003cp\u003eISBN-13: 9781489918062\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-1-4899-1804-8\u003c\/p\u003e \u003cp\u003eDimensions: 235cm x155cm\u003c\/p\u003e \u003cp\u003ePages: 358\u003c\/p\u003e ","brand":"Springer","offers":[{"title":"Default Title","offer_id":44359158694028,"sku":"9781489918062","price":225.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9781489918062.jpg?v=1755103093","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9781489918062","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}