Rapid Thermal Processing of Semiconductors

Borisenko, Victor E.; Hesketh, Peter J.

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Details

Published by: Springer

Publication Date: 2013-06-20

Format: Paperback

ISBN-10: 9781489918062

ISBN-13: 9781489918062

DOI: 10.1007/978-1-4899-1804-8

Dimensions: 235cm x155cm

Pages: 358