Ultra-thin Chip Technology and Applications

Burghartz, Joachim

Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.

Details

Published by: Springer

Publication Date: 2010-11-19

Format: Hardcover

ISBN-13: 9781441972750

DOI: 10.1007/978-1-4419-7276-7

Dimensions: 235cm x155cm

Pages: 467