{"product_id":"9780792350088","title":"Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices","description":"\u003ch1\u003eFundamental Aspects of Ultrathin Dielectrics on Si-based Devices\u003c\/h1\u003e \u003ch2\u003eGarfunkel, Eric; Gusev, Evgeni; Vul', Alexander\u003c\/h2\u003e \u003cp\u003eAn extrapolation of ULSI scaling trends indicates that minimum  feature sizes below 0.1 mu and gate thicknesses of \u0026lt;3 nm will be  required in the near future. Given the importance of ultrathin gate  dielectrics, well-focused basic scientific research and aggressive  development programs must continue on the silicon oxide, oxynitride,  and high K materials on silicon systems, especially in the critical,  ultrathin 1-3 nm regime. The main thrust of the present book is  a review, at the nano and atomic scale, the complex scientific issues  related to the use of ultrathin dielectrics in next-generation  Si-based devices. The contributing authors are leading scientists,  drawn from academic, industrial and government laboratories throughout  the world, and representing such backgrounds as basic and applied  physics, chemistry, electrical engineering, surface science, and  materials science. \u003cbr\u003e  \u003cem\u003eAudience:\u003c\/em\u003e Both expert scientists and engineers who wish to keep  up with cutting edge research, and new students who wish to learn more  about the exciting basic research issues relevant to next-generation  device technology.\u003c\/p\u003e \u003ch3\u003eDetails\u003c\/h3\u003e \u003cp\u003ePublished by: Springer\u003c\/p\u003e \u003cp\u003ePublication Date: 1998-03-31\u003c\/p\u003e \u003cp\u003eFormat: Paperback\u003c\/p\u003e \u003cp\u003e ISBN-10: 9780792350088\u003c\/p\u003e \u003cp\u003eISBN-13: 9780792350088\u003c\/p\u003e \u003cp\u003eDOI: 10.1007\/978-94-011-5008-8\u003c\/p\u003e \u003cp\u003eDimensions: 240cm x160cm\u003c\/p\u003e \u003cp\u003ePages: 507\u003c\/p\u003e ","brand":"Springer","offers":[{"title":"Default Title","offer_id":44359135461516,"sku":"9780792350088","price":153.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9780792350088.jpg?v=1755102005","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9780792350088","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}