{"product_id":"9780471078289","title":"Glow Discharge Processes Sputtering and Plasma Etching","description":"\u003ch1\u003eGlow Discharge Processes\u003c\/h1\u003e\u003ch2\u003eSputtering and Plasma Etching\u003c\/h2\u003e\u003ch3\u003eBrian Chapman\u003c\/h3\u003e\u003cdiv\u003e\u003cb\u003eScience \/ Physics \/ Electromagnetism\u003c\/b\u003e\u003c\/div\u003e\u003cbr\u003e\u003cdiv\u003eDevelops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.\u003c\/div\u003e\u003cdiv\u003e \u003cp\u003e\u003cb\u003eBrian Chapman\u003c\/b\u003e is the author of \u003ci\u003eGlow Discharge Processes: Sputtering and Plasma Etching\u003c\/i\u003e, published by Wiley.\u003c\/p\u003e\n\u003c\/div\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003ePublication Date: \u003c\/td\u003e\n\u003ctd\u003e25 September 1980\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePublisher: \u003c\/td\u003e\n\u003ctd\u003eWiley\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eImprint: \u003c\/td\u003e\n\u003ctd\u003eWiley-Interscience\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eISBN-13: \u003c\/td\u003e\n\u003ctd\u003e9780471078289\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFormat: \u003c\/td\u003e\n\u003ctd\u003eHardback\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePage Count: \u003c\/td\u003e\n\u003ctd\u003e432\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight (oz): \u003c\/td\u003e\n\u003ctd\u003e29.92\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":44381100736652,"sku":"9780471078289","price":263.65,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9780471078289_0545b183-b370-4650-8dd6-8ac0349b3112.jpg?v=1780234240","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9780471078289","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}