{"product_id":"9780470749838","title":"Introduction to Microfabrication","description":"\u003ch1\u003eIntroduction to Microfabrication\u003c\/h1\u003e\u003ch3\u003eSami Franssila\u003c\/h3\u003e\u003cdiv\u003e\u003cb\u003eTechnology \u0026amp; Engineering \/ Electronics \/ Microelectronics\u003c\/b\u003e\u003c\/div\u003e\u003cbr\u003e\u003cdiv\u003eThis accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered.  \u003cp\u003eThis \u003ci\u003esecond edition\u003c\/i\u003e includes:\u003c\/p\u003e \u003cul\u003e \u003cli\u003eexpanded sections on MEMS and microfluidics related fabrication issues\u003c\/li\u003e \u003cli\u003enew chapters on polymer and glass microprocessing, as well as serial processing techniques\u003c\/li\u003e \u003cli\u003e200 completely new and 200 modified figures\u003c\/li\u003e \u003cli\u003emore coverage of imprinting techniques, process integration and economics of microfabrication\u003c\/li\u003e \u003cli\u003e300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems\u003c\/li\u003e \u003cli\u003esolutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book\u003c\/li\u003e \u003c\/ul\u003e \u003cp\u003eWith clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike.\u003c\/p\u003e \u003cp\u003e\u003ca href=\"http:\/\/www.wiley.com\/go\/Franssila_Micro2e\"\u003ewww.wiley.com\/go\/Franssila_Micro2e\u003c\/a\u003e\u003c\/p\u003e\n\u003c\/div\u003e\u003cdiv\u003e  \u003cb\u003eProfessor Sami Franssila, Helsinki University of Technology, Finland\u003c\/b\u003e\u003cbr\u003e Sami Franssila has taught courses on microfluidics, bioMEMs, microsystems, nanoscience, silicon microtechnology and thin-film technology at Helsinki University of Technology since 1998. He is group leader of the Microfabrication group at Micronova, the Centre for Micro and Nanotechnology which is run jointly by the VTT Technical Research Centre of Finland and Helsinki University of Technology.\u003cbr\u003e Professor Franssila researches into micro- and nanofabrication for fluidic, chemical and biological devices, chemical microsystems and thin film technology.\u003cbr\u003e He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written one textbook \u003ci\u003eIntroduction to Microfabrication\u003c\/i\u003e, published by John Wiley \u0026amp; Sons in 2004.\u003c\/div\u003e\u003cbr\u003e\u003ctable\u003e\n\u003ctr\u003e\n\u003ctd\u003ePublication Date: \u003c\/td\u003e\n\u003ctd\u003e01 November 2010\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePublisher: \u003c\/td\u003e\n\u003ctd\u003eWiley\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eImprint: \u003c\/td\u003e\n\u003ctd\u003eWiley\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eISBN-13: \u003c\/td\u003e\n\u003ctd\u003e9780470749838\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eFormat: \u003c\/td\u003e\n\u003ctd\u003eHardback\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003ePage Count: \u003c\/td\u003e\n\u003ctd\u003e536\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd\u003eWeight (oz): \u003c\/td\u003e\n\u003ctd\u003e41.6\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/table\u003e","brand":"Wiley","offers":[{"title":"Default Title","offer_id":44384852312204,"sku":"9780470749838","price":87.26,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0710\/9545\/1788\/files\/9780470749838.jpg?v=1780193966","url":"https:\/\/fh90cf-fv.myshopify.com\/products\/9780470749838","provider":"Late Knight Books and Services, LLC","version":"1.0","type":"link"}